year 13, Issue 1 (Journal of Acoustical Society of Iran 2025)
مجله انجمن علوم صوتی ایران (مهندسی صوتیات سابق) 2025, 13(1): 62-67 |
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Koohsorkhi J, Madadi Bandan A R, Hamidzadeh M H. Investigation of the Sensitivity of a Micro-Machined Acoustic MEMS Sensor to Input Sound Wave Intensity. مجله انجمن علوم صوتی ایران (مهندسی صوتیات سابق) 2025; 13 (1) : 7
URL: http://joasi.ir/article-1-306-en.html
URL: http://joasi.ir/article-1-306-en.html
Abstract: (19 Views)
In this article, the sensitivity of a micro‑fabricated acoustic sensor for particle velocity measurement is investigated. The sensor was fabricated using a silicon‑based micromachining process, and a dedicated readout circuit was designed to fully process its signal. To mitigate thermal power loss through the substrate and reduce interference effects, the two‑wire sensing structure was suspended within a short acoustic channel of rectangular cross‑section. The direction, intensity, and frequency of the incident sound wave are the three key parameters influencing the sensor's performance; This study focuses on the effect of intensity. The sensor was designed and fabricated for the frequency range of 100–2000 Hz, functioning not only as a directional sensor but also as an intensity‑measuring microphone. The results indicate that a 15 dB reduction in the input sound pressure level (SPL) leads to a 50% decrease in the sensor's output at 1 kHz. The sensor exhibits a sensitivity of approximately 3 mV per 10 dB after amplification, making it suitable for acoustic measurement in a wide range of applications.
Article number: 7
Type of Study: Applicable |
Subject:
General
Received: 2024/10/1 | Accepted: 2025/10/15 | Published: 2025/12/21
Received: 2024/10/1 | Accepted: 2025/10/15 | Published: 2025/12/21
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